雷射都卜勒振動儀系統簡介及其在產品檢測之應用
White Light Interferometry
Newton’s Color Scale
Reference :[10]
White Light Interferometry
Mechanical Fixtures Design of Differential LDV/LDI (IBM)
-translation stage
angle prism mirror
beam splitter
-translation stage
angle prism mirror
beam splitter
head
-rotation stage
AVIDTM Optical Configurations
Three-In-One Optical Configurations
Single-beam configuration
Dual-beam configuration
Long-distance interferometer configuration
P
B
S
2
4
%
N
P
B
S
Q
W
(
4
5
)
C
C
D
P
D
1
P
D
2
P
B
S
3
P
B
S
4
P
D
3
P
D
4
B
E
A
M
1
B
E
A
M
2
Laser
Fiber
Rotatable
Mount
Aperature
mirror
PBS 1
Mirror
Microscope
lens
Observing
port
L1
Corner cube
C1
Mirror (with
calibration PZT)
AVIDTM Mechanical Configuration
Built-In Stages
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