微纳米加工技术论文微纳米加工技术及其应用综述.docx

湘潭大学期末论文题目:微纳米加工技术及其应用综述学院:材料与光电物理学院专业:学号:姓名:指导教师:微纳米加工技术及其应用综述摘要:材料与结构在微纳米尺度展现了许多不同于宏观尺度的新特征,纳米技术已经成为当前科学研究与工业开发的热门领域之一。微小型化依赖于微纳米尺度的功能结构与器件,实现功能结构微纳米化的基础是先进的微纳米加工技术。文章对微纳米加工技术做了一个综合的介绍,简要说明了微纳米加工技术与传统加工技术的区别,并对当前微纳米加工技术面临的挑战和今后发展的趋势作了预测。关键字:纳米技术;微纳米加工技术;纳米材料Overviewofmicro/nanofabricationtechnologiesandapplicationsAbstract:,andafewprinciplesonhowtochooseanappropriatemicro/,:Nanotechnology;Microandnanofabricationtechnology;Nanometermaterials目录前言·····································································································································3一、纳米技术的简要介绍·································································································4(一)纳米技术的涵义涵义·····························································································4(二)纳米技术发展的原因·····························································································5(三)纳米加工技术的概述·····························································································5二、微纳米加工技术的分类·····························································································6(一)无掩膜电化学微纳米加工技术·············································································7(二)掩膜电化学微纳米加工技术·················································································8(三)我国纳米器件的研究现状······························································