Based on a roundness measuring instrument, the parallel degree of planeness measuring method Yang Weichuan Wang Baorui Yuan Daocheng High precision coordinate measuring machine single axis measurement uncertainty U95 is about m, plus the straightness error, then the coordinate measurement machine for parallelism, the flatness measurement uncertainty U95 is about 1 m. Equal thickness interferometer can solve the problem of high precision flatness measurement issues ( such as flat crystal test), but the parallelism is lack of higher precision measurement method, and when the measurements need to part end on specific points, equal thickness interferometer is incapable of action. In the roundness measuring instrument with high accuracy, without changing any hardware and software can solve the above problem. Roundness of cylindrical face flatness and parallelism measurement is available through the work spindle rotating circular motion and the transverse arm to drive the measuring head radial movement, measurement data points in several concentric distribution. Because in order to realize the multi circle roundness measuring instrument for mining point measurement, must be in the end surface of the workpiece is moved radially probe, which would be roundness instrument arm guide rail straightness and relative to the spindle is not perpendicular to the flatness and parallelism mea
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