SEM扫描电子显微镜基础知识(英文).ppt

Basic Principles of
Electron Microscopy
FEI Company Copyright © 2008
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Phenom Explained - Basic Principles of Electron Microscopy
Introduction
This basic course is designed to help you get more familiar into the world of electron microscopy. Many textbooks, documents and courses are available about this subject.
The aim of this course is to keep the information at a basic level and focused towards the Phenom. The course aims for starters in the world of electron microscopy. In case more in-depth knowledge is needed, one need to study more advanced textbooks. A highly recommended textbook is;
Scanning Electron Microscopy and X-Ray Microanalysis, 3rd Edition,
Joseph Goldstein, Dale Newbury, David C. Joy, Charles E. Lyman, Patrick Echlin, Eric Lifshin, Linda Sawyer, and Joseph Michael, Kluwer Academic/Plenum Publishers, New York, 2007. 689 pages. (ISBN -- 0-306-47292-9)
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Acknowledgement
Special thanks to Oxford Instruments Analytical, Halifax Road, High Wycombe, UK for all the animated movies and many drawings.
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FEI Company Copyright © 2008
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Scanning Electron Microscopy
Section 1 – Introduction
What is Electron Microscopy?
Why use electrons instead of light?
Transmission Electron Microscope (TEM)
Scanning Electron Microscope (SEM)
Section 2 – Introduction to Scanning Electron Microscopy
Introduction to Scanning Electron Microscopy (SEM)
Section 3 – The Phenom
Introduction to the Phenom
Phenom; bridging the gap between LM and SEM
Section 4 – Electron Optics
Electron beam generation
Cathode gun
Electromagnetic lenses
Scanning
SEM Magnification
Section 5 – Electron beam / Specimen interactions
What happens in the specimen during electron bombardment?
Types of signals
Secondary electron emission
Backscatter electron emission
Section 6 – Image formation and interpretation
Image display and recording
Backscattered electron detector
Se