Abstract 硕士论文 Abstract Interferometer iSwidely used toachieve the refe:renceflat works憋an idealflat which contributes itsown flatness errors ,it is acomparative method andtheprecision isrestricted tothatofthe reference to obtainthe absolute surface distributions,a novel method ispresented toachieve the absolute flatnessme觥emem based on two flats inthe Fizeau using the three surfaces ofthetwo flats,the verticalprofiles ofboth low spatialfrequencies andhi曲spatial frequencies are obtained adding one rotationmeasuremem,the whole surface profiles methodCan beextended toapply asions such as thelargeaperture surface flatnessmeasuremem orcalibration forthe reference absolute measmement idea isintroduced tothemeasuremem ofthedeflectionangle of -prism method andthree-prism method aredesigned toachieve theabsolute measurement ofthe deflectionangles intheFizeau interferometer. Experiments areimplemented toobtained thesurface profiles by the two-flat absolute experiment results are givenand the errors precision is betterthan入/ withaperture of600mm arealsomeasured by two fiat testand the verticalprofiles thethreeflat testapplication ofZygo,the experimental pared、析th thatofthetwo good coincidence that vertical results ale differed (rms)and thehorizontal resultsalediffered (rms), which testifiesthefeasibility ofthe two absolute deflectionangles ofthe pentaprisms are carried outand the resultsalegiven by botllthetwo·prism method and the three-prism thatthedifferencebetween thetwo methods islessthan Keywords:interferometry,absoluteme删ement,two flattest;pentaprism 图表目录硕士论文 VI ??????????????????????4 ???????????????????????。5 ??????????????????6 ??????
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