topologically optimized nano-positioning stage integrating with a capacitive comb sensor 2017 tao chen资料.pdf

该【topologically optimized nano-positioning stage integrating with a capacitive comb sensor 2017 tao chen资料 】是由【小舍儿】上传分享，文档一共【13】页，该文档可以免费在线阅读，需要了解更多关于【topologically optimized nano-positioning stage integrating with a capacitive comb sensor 2017 tao chen资料 】的内容，可以使用淘豆网的站内搜索功能，选择自己适合的文档，以下文字是截取该文章内的部分文字，如需要获得完整电子版，请下载此文档到您的设备，方便您编辑和打印。:..sensorsArticleTopologicallyOptimizedNano-PositioningStagebSensorTaoChen,YaqiongWang,HuicongLiu*,ZhanYang*,PengboWangandLiningSunJiangsuProvincialKeyLaboratoryofAdvancedRobotics&CollaborativeInnovationCenterofSuzhouNanoScienceandTechnology,SoochowUniversity,Suzhou215123,China;******@suda.(.);******@.(.);******@suda.(.);******@hit.(.)*Correspondence:******@suda.(.);******@suda.(.);Tel.:+86-512-6758-7217(.)AcademicEditor:StefanoMarianiReceived:25November2016;Accepted:24January2017;Published:28January2017Abstract:Nano-positioningtechnologyhasbeenwidelyusedinmany?elds,suchasmicroelectronics,opticalengineering,-dimensional(1D)nano-positioningsystem,eramic(PZT)actuatorandamulti--,awedge-shapedstructureisusedtoapplytheprecisepre-?niteelementanalysisandexperimentalveri?cation,-mandhigh-?exibleandef?cientwayinthedesignandoptimizationofthenano-:nano-positioningstage;multi-(IC)manufacturingprocess,ultra-precisionmachining,andbio-medicalengineering,long-strokeandprecisenano-positioningtechnologyhavebeenoneofthehottestresearchareasinprecisionengineering[1,2].Recentresearchhasfocusedonthedesignandmanufacturingofnano-positioningstagesandhigh-precisionsensors,aswellasprecisecontrolmethods[3–6].Comparedwithtraditionalbulkmechanicalstages,thenano-positioningstageshaveshorterproductlifecyclesandhigherperformanceindicatorstosatisfythedevelopmentrequirementsofmicroelectronics[7].The?exibleandef?cientdesignmethodologiesareurgentformeetingthehighdemandsofnano-,asakindofconceptualdesignmethodology,couldbeachoiceofpriority[8].Differentfromthetraditionaloptimizationsofsizesandshapes[9],,theobjectivefunctionoftopologyoptimization,asdesignvariables,-positioningstage,thetopologyoptimizationcanenhanceandimprovethestageperformancesigni?cantly[10,11].Ansolaetal.[10]appliedanevolutionarystructuraloptimization(ESO),.[11]appliedthetopologyoptimizationinthesizeoptimizationofthestageandenhancedthestaticandharacteristicssigni?,uracy,high-precisionnano-,17,257;doi::..Sensors2017,17,2572of13Amongthese,ethe?rstchoiceofthetestingdevices,duetotheirhighprecision,goodsensitivity,andhighstability[12,13].ethedrawbacksoflimitedrangeofcapacitivetesting,thecapacitivesensorsaregenerallymadeintooffsetconstant-b-?ngeruracydemandsofnano-positioning[14,15].,thestructuresplicated,whichmaycausethefabricationdif?,bdrivecapacitivesensors,researchersaretendingtodesignnanopositionerswithamonolithicstructuretoformaclosed-,wehaveadoptedthetopologyoptimizationapproachtoachieveawidedisplacementrangeanda?neresolutionofthenano-,,mtravel,uracywith10nm,(MEMS)--positioningstageisoptimizedbymulti--b-?ngercapacitorismicro--,thenano--?gurationTheschematicdrawingoftheproposednano-(PZT)actuator,aleverampli?cationmechanism,aloadstage,---positioningstageistodrive?(Al-Mgalloy,LY11).bsensoris10mm10mm1mm,including6bs,anditsmaximumtraveldistancecanachieve15,decidedbythePZTceramics,iscurrently60mm80mm20mm,anditcanbefurtherreducedto30mm30mmuracyofsmallerthan5nm,withhighstiffness,gooddynamicpropertyandsystemstability.:..SensorsSensors20172017,,1717,257,-positioningstagedevice.-,boththekinematicsandstIntraditionaldesign,boththekinematicsandstructuremustbeconsidered,whilethestructureructuremustbeconsidered,whilethestructuredesignisnormallyignoredduetotheoptimaldesignisnormallyignoredduetotheoptimalrule[rule[16].Weusemutualenergyconcept[17]to16].Weusemutualenergyconcept[17]todescribedescribetherequirementsasfollows:therequirementsasfollows:kkllkkllRllllLL((uu))==LL((tt,,uu))==?t(t(kk))uuddGΓuu2∈VV,(1)G(1)Γtktk,ZkllTka(ukllTk,v)=#(v)E#(u)dD,(2)auvvEudD(,)()()=?Dεε(2)klkDlkl,a(u,v)=L(v)u2V,8v2V,(3)wheret(k)istheforceatthepointk,(,)(),=∈?∈,(3)force,(u,v)(1),andtheenergyofvirtualworkiscalculatedt(k)istheforceatthepointk,,(2).a(u,v),plianceedbyusingLabel(1),andtheenergyofvirtualLq(up),meansthatworkiscalculatedbyusingLabel(2).suf?cientamountofdeformationcanbeproducedinthespeci?eddirection“p”underaspeci?edinput“Therequirementofkinematics,inorderq”.Regardingtherequirementofstructure,thestiffnessofsomepartsorportions“plianceLq(nu”mustbep),meansthatsufficientamountofdeformationcanbeproducedinthespecifieddirection“maximizedtoachievehighperformance,plianceLn(un).Inthispaper,topologyp”underaspecifiedinput“optimizationhasbeenconductedintheleverampli?erdesignofthestage,andthedesignareamustq”.Regardingtherequirementofstructure,thestiffnessofsomepartsorportions“n”mustbemaximizedtoachievehighpebeextendedtoavoidconcaveproblems[18].AscanbeseeninFigure2,aandbarethelengthandrformance,plianceLn(un).Inthispaper,topologyoptimizationhasbeenconductedintheleveramplifierdesignofthestage,andthewidthofextendeddesigndomain,respectively;canddarethedistancesfromthepivottotheoutputdesignareamustbeextendedtoavoidconcaveproblems[18].AscanbeseeninFigure2,aandbandinputhinges,,whilethearethelengthandwidthofextendeddesigndomain,respectively;,[19,20]intheverticaldirectionandfacilitatetheampli?cationexpansionofthestage,thet1isappliedbythePZTactuator,whiletheoutputdisplacementforcet5isaddedperpendiculartot2,[19,20],theforcet5isaddedperpendiculartot2,inordertodecreasethemovementintheverticaldirectionandensurethecontinuousgoaldirection.:..SensorsSensors20172017,,1717,257,,itissetasOnthebasisofthevirtualworkprinciple,itissetast3t=3=t1t1andandt4t4==?,,thedesigncanbedescribedasamulti-objectiveproblem,,themutualdescribedasamulti-objectiveproblem,,theplianceL(t2,u1)mustbemaximized;pliancesL(t2,u1)mustbemaximized;pliancesL(t3,u1)andL(t3L,u(t14)and,u2)mustbeL(t4,u2)minimized;pliancemustbeminimized;plianceL(t5,u1)?ndtheincorporationL(t5,u1),themulti-objectivefunctionisformulatedas:incorporationoptimalsolution,themulti-objectivefunctionisformulatedas:Ltu(,)2211maxf=L(t,u)maxf1=111.(4)(4)(wL(t3,312422512u1)2+(1w)L(t4,u2)2+wL(t5,u1)2)22((,)(1)(,)(,))wLtuwLtuwLtusssM+?+:Tobemoregeneral:maxmaxlog(())f=fWLuW=log(L2(u211))22,(5)**********(11W)log(wsL(332442512u)+(1ws)L(u)+wML(u))(5)??+?+(1)log(()(1)()())WwLuwLuwLussM2,whereW,wsandwMaretheweightcoef?(t2,u1)plianceL(t3,u1),L(t4,u2)aswellasL(t5,u2).wsdeterminestheweightbetweenwhereW,(t3,u1)pliance31L(t4,4u22).wistheweightcoef?cientfortherelative52complianceL(t,u)plianceL(t,u),L(t,u)aswellasML(t,u).(t3,u1)plianceL(t4,u2).?edoptimizationstructure,theeffectofweightingcoef?cientsW,ws,andwMontheoptimalcon??gurationandTogetaspecifiedoptimizationstructure,theeffectofweightingcoefficientsW,ws,andwMonweightcoef?,asrelationshipbetweentheoptimalconfigurationWincreases,plianceL(t3,u1)pliancesL(t4,u2),the?,asWincreases,(t3,u1)pliancesL(t4,u2),,thesuitableweightcoef?cientscanbeselectedtospecifythecon?,*L2(u1)*L3(u3)*L4(u4)*L2(u1)*L3(u3)*L4(u4)*L2(u1):pliance;*(u3),*L4(u4):-objectivefunctionaredetermined,theconvergencehistoryofthe*L2(u1):pliance;*L3(u3),*L4(u4):?