ultra-thin high-efficiency mid-infrared transmissive huygens meta-optics li zhang资料.pdf

该【ultra-thin high-efficiency mid-infrared transmissive huygens meta-optics li zhang资料 】是由【司棋夸克】上传分享，文档一共【9】页，该文档可以免费在线阅读，需要了解更多关于【ultra-thin high-efficiency mid-infrared transmissive huygens meta-optics li zhang资料 】的内容，可以使用淘豆网的站内搜索功能，选择自己适合的文档，以下文字是截取该文章内的部分文字，如需要获得完整电子版，请下载此文档到您的设备，方便您编辑和打印。ARTICLEDOI:-018-03831-7OPENUltra-thinhigh-ef?ciencymid-infraredtransmissiveHuygensmeta-opticsLiZhang1,2,JunDing3,4,HanyuZheng1,2,SensongAn4,HongtaoLin2,BowenZheng4,QingyangDu2,GufanYin2,JeromeMichon2,YifeiZhang2,ZhuoranFang2,,LongjiangDeng1,TianGu2,HualiangZhang4&JuejunHu2Themid-infrared(mid-IR)isastrategicallyimportantbandfornumerousapplicationsranging1234567890():,;?llingadiversecross-sectionofopticalfunctionsinthemid--opticalelementswereconstructedusinghigh-indexchalcogenide?lmsdepositedon?uoridesubstrates:thechoicesofwide-’meta-atomdesign,themeta-opticaldevicesfeatureanultra-thinpro?le(λ0/8inthickness)andmeasuredopticalef?cienciesupto75%intransmissivemodeforlinearlypolarizedlight,representingmajorimprovementsoverstate-of-the--IRtransmissivemeta-lenseswithdiffraction-,weightandpoweradvantages,coupledwiththemanufacturingscalabilityleveragingstandardmicrofabricationtechnologies,maketheHuygensmeta-opticaldevicespromisingfornext-generationmid-,icRadiationControlMaterials,UniversityofElectronicScienceandTechnologyofChina,Chengdu,Sichuan611731,&Engineering,MassachusettsInstituteofTechnology,Cambridge,MA02139,,EastChinaNormalUniversity,Shanghai200062,,UniversityofMassachusettsLowell,Lowell,MA01854,:LiZhang,JunDing,.(email:******@).(email:hualiang_******@).(email:******@)MUNICATIONS|(2018)9:1481|DOI:-018-03831-7|munications1MUNICATIONS|DOI:-018-03831-7hemid-infrared(mid-IR)spectralregion(–10themid-)containsthecharacteristicvibrationalmanufacturingofmeta-optics:wehavealreadyvalidatedlarge-T”absorptionbandsofmostmoleculesaswellastwoatmo-area(onfull6wafers),high-throughput(growthrate~100nm/spherictransmissionwindows,andisthereforeofcriticalmin)PbTe?lmdepositionviasimplesingle-sourcethermalimportancetomanybiomedical,military,andindustrialappli-evaporationandwafer-scalelithographicpatterningofthe?23–26cationssuchasspectroscopicsensing,thermalimaging,free-spacelm,mer-communications,,devi-ciallyavailablewithdiametersupto4”.Inadditiontothecesoperatinginthemid-IRbandoftenpresentatechnicalmaterialinnovation,ourworkalsomarksthe?-IR,andclaimssigni?canteperformanceimprovementoverpreviouslydemonstratedHMSopaqueatwavelengthbeyond3μm,mid-ponentsdevicesatopticalfrequenciesleveraginganadvancedtwo-ponentmeta-,orrequirebasedonwaveguidingeffectswhichmandatehighaspectratiocomplicatedfabricationmethodssuchasdiamondturning(.,nanostructurestocoverfull2πphase27,28,theconceptofHuygensermaniumoptics).Consequently,unlikemetasurfaces,originallyderivedfromthe?eldequivalenceprin-visibleornear-monplaceandcipleandelaboratedinSupplementaryNote1,enablesexquisiteeconomicallyavailableofftheshelf,mid-icwavepropagationinalow-pro?leparedtosurfacelayerwithdeepsub---unityopticalef?ciencyispossibleinOpticalmetasurfaces,arti?cialmaterialswithwavelength-prisingmeta-atomspossessingboth––thicknessesandon-icresponses13,pro-electricdipole(ED)icdipole(MD)-effective,high-performanceNevertheless,dielectricHuygensopticalmetasurfacesexperi--sheetstructurescanbereadilyfabri-mentallydemonstratedtodate,whicharemadeupofasinglecatedusingstandardmicrofabricationtechnologies,therebytypeofcircularorrectangularshapedmeta-atomswithvaryingpotentiallyenablinglarge-area,low-,sufferfrommuchloweref?cienciesaroundorbelow–icproperties,custom-tailorablethrough50%-atommeta-atomengineering,allowopticaldesignerstomanipulateconstructionsincuraninherenttrade-offbetweenphasecoverageunconventionalopticalbehavior(.,abnormalrefraction/andtransmissionef?ciency,ethislimitationbyre?ection,pensation,etc.)ponentmeta-,theirplanarnatureisbothrectangularandH-shapedmeta-“?at”opticsandsystemswithdrasticallyreduceduniqueapproachsigni?cantlybooststheopticaltransmittanceofsize,weight,andpower(SWaP)relativetotheirtraditionalbulkHMStoabove80%withoverallopticalef?cienciesupto75%,?,anumberofmetasurface-basedfunctionalopticalele-binationofjudiciousmaterialchoiceandinnovativementshavebeenrealizedinthemid-IRrange,includinglenses4,HMSdesignallowsustodemonstratehigh-performancetrans-–perfectabsorbers58,polarizationcontrollers9,10,modulators11,12,missivemeta-opticsoperatingnearthemid-,thermalemitters14,nonlinearcon-,we?rstdiscusstheHMSdesignrationaleverters15,,?-opticaldevices,adiffractivebeamde?ector,eliminatedinmetasurfacesbuiltentirelyoutofdielectricmate-acylindricallens,andanasphericlensarethenpresented.–rials1719,andsuchtransmissivedielectricmeta-opticsofferseveralwell-establishedadvantagesinopticalsystemdesignincludingincreasedalignmenttoleranceandsimpli?edon-axisResults?,chiralmetasurfacesmadeofSi/-lensesfabricatedusingSi-on-sapphire21havebeenarectangularmeta--,,?λversionefciencyupto50%.ThelatterSi-on-sapphiremeta-lensaxes,lessthan0/?ciencyashighas79%,althoughtheTotalthicknessofthePbTeblockis?xedat650nmor1/8ofthe?λ=μopticalefciencywasnotreportedandopticalfocusingwasnotfree-spacewavelength(),thesmallestamongdielec-,-,wesimulatedtheInthisarticle,wereportthedesignandexperimentalopticaltransmittancespectra(,Supple-demonstrationofhigh-ef?ciencymid-IRtransmissiveopticsmentaryNote2)and?eldpro?lesatEDandMDresonancesbasedondielectricHuygensmetasurface(HMS).Thenoveltyof(-j).AccordingtotheKerkercondition38,,wechoosethechalcogenidealloyspectrallyoverlappingEDandMDresonancesallowamaximumPbTetoconstructthemeta--?lltherefractiveindexexceeding5,PbTeisideallysuitedforcreatingcondition,theEDandMDresonancesoftherectangularmeta-dielectricmeta-atomssupportinghigh-():thedegreesofn=πintegrationonthelow-indexCaF2substrate().Thelargefreedomenablesfull2phasecoveragebydetuningtheEDand–,cultra-thinpro?leofthemeta-,amplitudeoftherectangularmeta-atomasfunctionsofLxandLλ=-atomperformance,MUNICATIONS|(2018)9:1481|DOI:-018-03831-7|municationsMUNICATIONS|DOI:-018-03831-)m)((-(degree)Lx(m)Lx(m)(degree)-(degree)--atomstructure;opticaltransmissionbamplitudeandcphaseoftherectangularmeta-atomasfunctionsofthemeta-atomdimensions;doptimizedopticaltransmissionofrectangularmeta-atomswithdifferentphasedelayvalues:theshadedregioncorrespondstothe“low-ef?ciencygap”whererectangularmeta-atomsfailtoprovidesatisfactoryperformance;etop-viewschematicofanH-shapedmeta-atom;foptimizedopticaltransmissionofH-shapedmeta-atomswithdifferentphasedelayvalues:thedesignofferssuperioref?ciencytobridgethe“low-ef?ciencygap”;gphaseshiftandtransmittanceoftheeightmeta-atomelementsusedtoconstructthemeta-opticaldevices:thecorrespondingmeta-atomdesignsarealsomarkedin(d)and(f)withredtrianglesabc627nm54ntoplayerktoplayerHeight3nbottomlayerIndexkbottomlayer2PbTe1ToplayerBottomlayer500nmCaF022345678910–19nmWavelength(μm)?cientkofthePbTematerialmeasuredusingellipsometryand?ttedtoatwo-layermodel;insetshowsaschematicdepictionofanH-shapedmeta-atom;bcross-sectionalSEMimageofthePbTe?lm;csurfacemorphologyofPbTe?lmmeasuredusingAFM;dschematicfabricationprocess?owofthemeta-opticaldevices;etilted-viewSEMimageoffabricatedmetasurfacestructureMUNICATIONS|(2018)9:1481|DOI:-018-03831-7|munications3MUNICATIONS|DOI:-018-03831-+(degree)(nm)de70806060+150Γx–10+14040–1301stOrder200thOrder20TotaltransmissionPowerefficiency(%)10Powerefficiency(%)–10+20z0518052005220524052605280x–20–100102030Wavelength(nm)yAngle(degree)?-viewSEMimageoftheHMSbeamde?ector:theredboxmarkstheunitcell;bsimulatedelectric?eldpro?,clearlyshowingthebeamde?ectioneffect;csimulatedandexperimentallyevaluatedwavelengthdependenceofthebeamde?ectionangle,uracy(±)ofmeasurementsetup;dexperimentallymeasuredspectrafortotaltransmission(sumofalltransmissivediffractionorders),1stdiffractionorder(theblazedorder)and0thorder(speculartransmission)ofthede?ector;eangle-?guresbyselectingLxandLytoyieldthemeasuredusingvariableanglespectroscopicellipsometry(.).Wefoundthataphenomenologicaltwo-layer2π,?gure,weseethatwhilethemodelbestdescribestheopticalpropertiesofthe?lm,whichrectangularmeta-atomdesignoffers2πphasecoverage,~120°positionandmicrostructurephaserange(?lmthicknessowingtononcongruenttransmission(<80%).Theobservationsuggeststhatatleasttwovaporizationandthe