清华大学学报投稿模板.doc

一款微型静电旋转电机设计
林奎成
(清华大学精仪系,北京 100084)
摘要:微型静电电机是MEMS技术中一种非常重要的机械驱动装置,相关的研究引起了国内外学者的高度重视。本文从原理方案设计、结构设计、集总参数建模、数值仿真计算等方面对一款典型的微型静电旋转电机进行了设计。结合理论推导公式分析了静电旋转电机的性能优化方法。根据理论转矩公式设计了电机相关尺寸参数,计算出当最大激励电压为50V时,其理论最大转矩为7N·nm,满足实际要求。采用表面微机械加工、表面刻蚀以及气相沉积相结合的方法设计了微型静电电机的加工工艺。
关键词:微型静电电机;集总参数;结构设计;表面刻蚀
中图分类号:
Design of a micro electrostatic rotary motor
Lin Kuicheng
(Department of Precision Instruments and Mechanology Tsinghua University, Beijing 100084)
Abstract: Electrostatic micro-motor is a very important technology in the MEMS mechanical driveunit,related research has aroused great attention of scholars home and abroad. From the principle of design, structural design,lumped parameter modeling,numerical simulation and other aspects,a typical micro electrostatic rotary motor is designed. Combining theoretical formula, this article analysed the electrostatic rotary motor performance optimization methods. According to the theoretical design of the motor torque formula, this article designed size parameters, calculated that when the maximum excitation voltage of 50V, its theoretical maximum torque 7N•nm,meeting the actual requirements. Using surface micro-machining, surface etching and vapor deposition method designed of a micro electrostatic motor processes.
Keywords: electrostatic micro-motor; lumped parameter; structural design; surface etching
前言
微机电系统(MEMS)技术的发展使得众多的工业领域出现了革命