电磁悬浮式微驱动器的有限元分析研究*
周砚江,潘科荣,陈军,杨涛,陈本永
(浙江理工大学纳米测量技术实验室杭州 310018)
摘要:设计了一种新型的多点峰值磁场相互作用的电磁悬浮式微驱动器,解决了悬浮驱动力与横向力相互耦合的问题,有利于调节悬浮体的运动姿态。通过对悬浮力关于输入电流、气隙高度做单一因素参数化有限元分析和联合参数化有限元分析,得到了微驱动器有限元特征参数关系曲线。通过实验测试,得到的实验特征参数关系曲线与理论特征参数关系曲线和有限元特征参数关系曲线吻合一致,表明了所设计的微驱动器的可行性。
关键词:微驱动器;电磁悬浮;参数化有限元分析;特征参数关系曲线
中图分类号:TP215 文献标识码:A 国家标准学科分类代码:460. 4025
Finite element analysis of an ic levitation micro-actuator
Zhou Yanjiang, Pan Kerong, Chen Jun, Yang Tao, Chen Benyong
(Nanometer Measurement Lab, Zhejiang Sci-tech University, Hangzhou 310018, China)
Abstract:A novel ic levitation micro-actuator with multiple-point-peak ic field interaction is proposed. In the micro-actuator, the problem of coupling of suspension force and lateral force is solved, and the movement pose can be easily adjusted by controlling the intensity of every peak ic field. The trajectory curve of the finite element analysis for the micro-actuator is obtained through single factor parametric finite element analysis and united finite element analysis of suspension force to current and air-gap. The trajectory curve obtained from experiment result is in a good agreement with those derived from finite element analysis and theoretical analysis, which verifies the feasibility of the micro-actuator.
Key words:micro-actuator; ic levitation; parametric finite element analysis; trajectory curve
1 引言
在超精密加工、微机电系统、生物工程等领域,迫切需要高精度的微运动系
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