用纳米碳制备光子晶体.pdf

红外与毫米波学报
第 21 卷增刊 VoI. 21,SuppI.
2002 年 3 月 J. Infrared MiIIim . Waves March,2002
用纳米碳制备光子晶体!
栾峰章蓓徐军张会珍
(北京大学物理系,介观物理国家重点实验室,北京,100871)
摘要利用电子束诱导沉积纳米碳柱方法,在一台由 KYKY1010B 型扫描电子显微镜(SEM)改装的电子束曝光系
统中发展了一种无需光刻胶的亚微米图形化技术,微型碳柱的高度和直径可通过改变聚焦电子束参数加以控制.
通过控制电子束辐照位置和对样品台相对漂移的修正,在镀金的半导体表面范围内分别得到由纳米碳
8!m X 8!m
柱形成的光子晶体点阵,包括正方、六方对称和八重准对称等点阵结构,为进一步开展半导体光子晶体的实验研究
打下了良好的基础.
关键词电子束辅助沉积,微结构,二维光子晶体,纳米碳.
FABRICATION OF PHOTONIC CRYSTALS
BY NANOCARBON!
LUAN Feng ZHANG Bei XU Jun ZHANG Hui-Zhen
(Department of Physics,Peking University,NationaI Key Laboratory for Mesoscopic Physics,
Beijing 100871,China)
Abstract A technigue of resistIess nano-patterning was deveIoped in an eIectron beam Iithographic system modified from a
KYKY1010B scanning eIectron microscop(e SEM). This approach is based on a phenomenon of eIectron beam-induced de-
positio(n EBID)of carbonaceous nano-cone. The height and diameter of the carbon nano-cones were controIIed by the pa-
rameters of the focused eIectron-beam during the deposition. After carefuI correction for shift of the expected e-beam expo-
sure point reIative to the sampIe hoIder,the two-dimentionaI photonic crystaIs with sguare,trianguIar arrays and the oc-
tagonaI guasi-symmetric array with an area about 8!m X 8!m were essfuIIy fabricated on the goId fiIm coated semicon-
ductors. This ess provided a possibIe route towards