基于ARM-LINUX的GPS导航系统 论文.doc

摘要
微机电系统(Micro Electro-Mechanical System,MEMS)技术是一门新兴的技术,具有非常广阔的应用前景。近年来, MEMS技术越来越受到世界各国的重视。微电子加速度计是MEMS技术的一个重要应用领域,是微机械技术中的一类有代表性的结构。
本论文主要针对一种典型MEMS器件(悬臂梁式微电子加速度计)建立其系统动力学模型,分析其动力学特性。首先对微机电系统作了简要概述,介绍了其定义,理论基础,器件分类,发展历程及其在各方面的应用。
其次简要分析了一般微电子加速度计的工作原理,以叉指式微电子加速度计为例分析其工作原理,检测系统及静电反馈系统。并介绍了微电子加速度计的应用和发展趋势。
最后重点介绍了有限元的发展和ANSYS软件,并以其为基础建立了悬臂梁式微电子加速度计的实体模型,采用有限元分析软件ANSYS对其进行模态分析。
通过对MEMS器件系统动力学模型的建立与分析,加深了对影响器件性能各因素的了解,为今后微器件的设计制造提供了理论参考。
关键词 MEMS;微电子加速计;动力学分析;ANSYS
Abstract
Micro Electro-Mechanical System,as a newly developed subject,is the study of focal point of the future world science with a very broad application foreground. In recently years, It is more and more valued by the munity. Micro-electro accelerometer is an important application realm of MEMS technique.
This paper aims to establish the System Dynamics model of a typical MEMS’ part:cantilever micro-electro acclerometer,and analyzes the dynamic ,this paper made to MEMS a brief summary,and introduced its definition, theories foundation, spare part classification, development process and its application in every have a first step understanding to the MEMS.
Secondly,by analyzing the working principle mon briefly, this paper analyzes the working principle of the interdigital micro-electro accelerometer as an example, and check on the system and the static feedback system. Then introduced the application and development trend of micro-electro acclerometer.
Finally, the main introduction is the ANSYS software and its development .Then the physical model of cantilever micro-electro accelerometer is established. With the analysis of modal by ANSYS.
The establishment and analysis of MEMS system dynamic model, which furthers the understanding of all the elements concerning the functioning parts, provides theoretical reference for future design.
Keywords MEMS; Micro-electro Accelerometer; Dynamics Analysis;ANSYS
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目录
摘要 I
Abstract II
第1章绪论 1
微机电系统