真空罗茨泵设计说明书.doc

卷绕式真空镀膜机真空泵结构设计 I 摘要真空泵,机械,物理,化学,物理和化学方法如萃取容器中,以获得和维持真空设备。真空泵和其他设备(如真空容器,真空阀,真空计,连接管路等)组成的真空系统, 广泛应用于电子,冶金,化工,食品,机械,制药,航空航天等行业。按泵的工作原理, 本质上捕获气体进入气体泵和泵的类型。泵包括:液环真空泵,往复式真空泵,旋片式真空泵,真空泵定子,活塞泵,摆线泵,干式真空泵,真空泵,分子泵,牵引泵,复合泵,水喷射泵气体喷射泵,蒸汽喷射泵,扩散泵。捕获的气体泵,包括:一个吸附泵和低温泵。针对设计要求,对罗茨真空泵进行了设计。主要包括传动系统的设计。罗茨真空泵工作原理与罗茨鼓风机相似。由于转子的连续旋转,气体从进气口吸入到转子与壳体之间的空间中,然后通过排气口排出。因为空间是封闭的抽吸状态下,所以不存在气体在泵室的压缩和膨胀。然而,当转动时,转子的排气口的上边缘,该空间与排气侧连通, 排气侧的气体压力越高,洗涤气体的一部分返回到该空间中,气体的压力急剧增加。随着转子继续旋转时,气体排出泵。关键词: 真空镀膜机;真空泵;结构设计卷绕式真空镀膜机真空泵结构设计 II Abstract Vacuum pumps with mechanical , physical , chemical , physical and chemical methods such as container extraction in order to obtain and maintain a vacuum device . Vacuum pumps and other equipment (such as vacuum container , vacuum valves , vacuum gauges , connecting pipes , etc.) consisting ofa vacuum system , widely used in electronics , metallurgy , chemical , food , machinery , pharmaceuticals , aerospace and other sectors. Press the pump works , essentially trapping gases into the gas pump and pump types . Pump include : liquid ring vacuum pumps , reciprocating pumps , rotary vane vacuum pumps , vacuum pump stators , piston pumps , trochoid pump , dry vacuum pumps , vacuum pumps , molecular pumps , traction pumps , composite pumps , water jet pump gas jet pumps , steam jet pumps , diffusion pumps. Trapped gas prising: a sorption pump and a cryopump . For the design requirements , the Roots vacuum pump design . Including the transmission system designs. Roots vacuum pump works with the Roots blower similar. Due to the continuous rotation of the rotor , gas is drawn from the intake port into the space between the rotor and the casing , and then discharged through the exhaust port. Because the space is closed suction state , so there isno gas in the pump pression and expansion . However , when the top edge of the exhaust port of the rotor rotated , the municates with the exhaust side , the higher the exhaust -side gas pressure ,a portion of the washed gas back to the spa