Matls Char ’n MGH Electron Microscopy: SEM and TEM Matls Char ’n MGH Electron Microscopes SEM TEM Developed 1960s 1930s Useful Mag ’n Range 20-100,000 1,000-1,000,000 Working Beam Voltage 1 – 30 kV 100 – 1,000 kV Vacuum High Vacuum always required: there are some low-vacuum SEMs (chamber vacuum low) Samples Large 2-3 mm disc (foils) Sample Handling Tilts ± 45, Rotation, etc Double tilt stage Analysis EDX EDX WDX EELS Diffraction EBSP/OIM Spot Patterns Electron Channelling Ps Kikuchi Patterns Convergent Beam ED Image Handling Digital Film/Digital Matls Char ’n MGH Matls Char ’n MGH Matls Char ’n MGH Matls Char ’n MGH Matls Char ’n MGH Matls Char ’n MGH Matls Char ’n MGH Matls Char ’n MGH
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