Double Value Characteristic of Leak Rate of Pressure Adding Helium Mass Spectrum Test and the Reliable Combination of Gross- and Fine-leak Detection of the seal Abstract
Along with the micro electron technology development, the electronic products integration rate increases day by day. The higher speed, the boosting power, the increasing I/0 numbers give the seal technology more requirements, the seal density directly affects the qualification and reliability of IC manufacture, as will as the high frequency performance, the thermal properties, the reliability and the cost of IC. The helium mass spectrum analyzes leakage analysis is one of the popular leak detection method. But the influence of the analysis result, caused by the double value of characteristic of leak, didn’t find very good solutions since lo
