【毕设用---外文翻译来源】ANSYS英文论文 (10).pdf

Dynamic Capacitance Extraction of A Triaxial Capacitive
Accelerometer
Zhenchuan Yang, Gang LI, Yilong Hao, Guoying Wu
Institute of Microelectronics, Peking University, Beijing, 100871 China

Abstract
Capacitive sensing is widely used in micromachined sensors, such as accelerometers, pressure sensors,
gyroscopes, etc. In order to achieve desired performance, the capacitance variation according to external
excitation must be evaluated carefully. However, obtaining the analytical result is not easy, especially for
complicated deformations. This problem can be solved in ANSYS by building the electrostatic model
according to a structural analysis result, then extracting capacitance through CMATRIX. However,
rebuilding the model manually is not efficient and is sometimes very difficult, given plex model. In
this paper, a dynamic capacitance extraction method is presented to solve this problem. This method is
based on automatic mesh updating and physics environments. The analysis procedure is to first create the
structural and electrostatic physics environment, then do the structural analysis in the structural
environment, updating the mesh according to the result, and, lastly, extract capacitance through CMATRIX
in an electrostatic environment. A triaxial capacitive accelerometer is used as an example to evaluate this
method. The analysis results