基于太赫兹时域光谱的半导体材料参数测量.pdf.pdf

工艺技术与材料
Process Technique and Materials
基于太赫兹时域光谱的半导体材料参数测量
李雅卓, 李向军, 洪治
( 中国计量学院太赫兹技术与应用研究所, 杭州 310018)
摘要: 根据太赫兹时域光谱系统( TDS) 的测量原理, 提出了一个考虑 F-P 效应的半导体材
料参数测量方案。利用该方案可以在时域波形中, 截取多个反射回峰, 以提高材料参数提取的精
确度。另外, 考虑到多重反射对样品厚度的准确性要求较高, 提出了一种有效的厚度优化方法。
以 GaAs 为待测样品, 利用上述方法精确提取了其折射率与消光系数谱。并采用返波振荡器
( BWO) 作为太赫兹辐射源对相同样品进行测量, 有效的验证了使用 TDS 系统对半导体材料参数
测量的准确性。
关键词: 太赫兹时域光谱技术; Fabry-Perot 效应; 光学材料参数
中图分类号: TN307
文献标识码: A
文章编号: 1003-353X ( 2008) 12-1074-03
Highly Precise Determination of Optical Material Parameters with
THz Time-Domain Spectroscopy
Li Yazhuo, Li Xiangjun, Hong Zhi
( Centre f or THz Research, China Jiliang University , Hangzhou 310018, China)
Abstract: An optical material parameter extracting method was introduced, which considered the Fabry-
Perot effect by the measurement principle of THz time-domain spectroscopy. With this method, time window
could be got including a number of copies of the main pulses to enhance the accuracy of the optical parameters.
Furthermore, considering the thickness of sample must be precise, the accurate determination of the sample
thickness was proposed. A 1 mm-thick GaAs sample was chosen to extract its optical parameters. BWO was
used to measure the same sample to verify the result.
Key words: THz time-domain spectroscopy; Fabry-Perot effect; optical material parameter
: 0590
(TDS) 。
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