fabrication and characterization of pzt string based mems devices外文参考.pdf

Journal of Science: Advanced Materials and Devices 1 (2016) 214e219
comparable with those observed in large dimension membrane
Keywords:
Piezoelectric and cantilever based MEMS devices, which exhibit high potentials in variety of sensor and resonant
Clampedeclamped beam actuator applications.
String based MEMS © 2016 The Authors. Publishing services by Elsevier . on behalf of Vietnam National University, Hanoi.
CeV characteristics This is an open access article under the CC BY license (/).
Optical interferometer profiler
Quality factor
1. Introduction they always provide a high fabrication yield compared to cantile-
vers. Micro strings can detect masses of femtograms in air and
Micro- and Nanoelectromechanical system (MEMS and NEMS) hundreds of attogram in high vacuum can be detected [2].
devices find their use in sensing and actuating, drug delivery, DNA On the other hand, the sensitive electronic components endure
sequencing, homeland security, automotive industry [1]. Practi- some in